FRS Facility Detail Report


MKS INSTRUMENTS

EPA Registry Id: 110043931458
90 INDUSTRIAL WAY
WILMINGTON, MA 018870000


The facility locations displayed
come from the FRS Spatial
Coordinates tables. They are the
best representative locations for
the displayed facilities based on
the accuracy of the collection
method and quality assurance
checks performed against each
location. The North American
Datum of 1983 is used to display
all coordinates.

Environmental Interests

Information System System Facility Name Information System Id/Report Link Environmental Interest Type Data Source Last Updated Date Supplemental Environmental Interests:
RESOURCE CONSERVATION AND RECOVERY ACT INFORMATION SYSTEM
MKS INSTRUMENTS MAR000538686 VSQG (Y) RCRAINFO

ICIS-AIR (AIR)
MKS INSTRUMENTS MA0000002511903091 AIR MINOR AIR 10/13/2016
MASSACHUSETTS - ENVIRONMENTAL PROTECTION INTEGRATED COMPUTER SYSTEM
MKS INSTRUMENTS INC 402421 STATE MASTER MA-EPICS
EPICS-406403
AIR STATIONARY POINT SOURCE
EPICS-406401
HAZARDOUS WASTE PROGRAM

Additional EPA Reports:  

MyEnvironment  Enforcement and Compliance  Facility Coordinates Viewer  Watershed Report

Standard Industrial Classification Codes (SIC)

No SIC Codes returned.

Facility Codes and Flags

EPA Region: 01
Duns Number:
Congressional District Number: 06
Legislative District Number:
HUC Code/Watershed: 01090001 / CHARLES
US Mexico Border Indicator:
Federal Facility: NO
Tribal Land: NO

Alternative Names

No Alternative Names returned.

Organizations

Affiliation Type Name DUNS Number Information System Mailing Address
REGULATORY CONTACT
MKS INSTRUMENTS INC
MA-EPICS
View
OWNER
MKS INSTRUMENTS
RCRAINFO
View
OPERATOR
MKS INSTRUMENTS INC
RCRAINFO
View
OWNER
MKS INSTRUMENTS
MA-EPICS
View
OWNER
MKS INSTRUMENTS INC
MA-EPICS
View
REGULATORY CONTACT
MKS INSTRUMENTS INC
MA-EPICS
View
REGULATORY CONTACT
MKS INSTRUMENTS
MA-EPICS
View

National Industry Classification System Codes (NAICS)

Data Source NAICS Code Description Primary
RCRAINFO 334519 OTHER MEASURING AND CONTROLLING DEVICE MANUFACTURING.

Facility Mailing Addresses

Affiliation Type Delivery Point City Name State Postal Code Information System
REGULATORY CONTACT 90 INDUSTRIAL WAY WILMINGTON MA 018870000 MA-EPICS
OPERATOR 2 TECH DRIVE ANDOVER MA 01810-0000 RCRAINFO
OWNER 90 INDUSTRIAL WAY WILMINGTON MA 018870000 MA-EPICS
FACILITY MAILING ADDRESS 90 INDUSTRIAL WAY WILMINGTON MA 018870000 MA-EPICS
FACILITY MAILING ADDRESS 90 INDUSTRIAL WAY WILMINGTON MA 018870000 RCRAINFO
OWNER 2 TECH DRIVE ANDOVER MA 01810-0000 RCRAINFO

Contacts

No Contacts returned.

Query executed on: OCT-14-2025