FRS Facility Detail Report


CABOT MICROELECTRONICS CORP

EPA Registry Id: 110018139575
500 COMMONS DR
AURORA, IL 60504-4159


The facility locations displayed
come from the FRS Spatial
Coordinates tables. They are the
best representative locations for
the displayed facilities based on
the accuracy of the collection
method and quality assurance
checks performed against each
location. The North American
Datum of 1983 is used to display
all coordinates.

Environmental Interests

Information System System Facility Name Information System Id/Report Link Environmental Interest Type Data Source Last Updated Date Supplemental Environmental Interests:
EMISSION INVENTORY SYSTEM (EIS)
CABOT MICROELECTRONICS CORP 3220611 AIR EMISSIONS CLASSIFICATION UNKNOWN EIS 08/26/2021
RESOURCE CONSERVATION AND RECOVERY ACT INFORMATION SYSTEM
ENTEGRIS INC. ILD984846477 VSQG (Y) RCRAINFO

AGENCY COMPLIANCE AND ENFORCEMENT SYSTEMS
COBOT MICROELECTRONICS CORP 170000075656 STATE MASTER ACES
-0434075018
HAZARDOUS WASTE PROGRAM
-043407AAB
AIR PROGRAM
-0434075018
SOLID WASTE PROGRAM
BIENNIAL REPORTERS
ENTEGRIS INC. ILD984846477 HAZARDOUS WASTE BIENNIAL REPORTER RCRAINFO 12/31/2009
AIR FACILITY SYSTEM
COBOT MICROELECTRONICS CORP 1704300711 AIR MINOR (PERMANENTLY CLOSED) AIRS/AFS 05/16/2014
ICIS-AIR (AIR)
COBOT MICROELECTRONICS CORP IL000043407AAB AIR MINOR ICIS 10/19/2014

Additional EPA Reports:  

MyEnvironment  Enforcement and Compliance  Facility Coordinates Viewer  Watershed Report

Standard Industrial Classification Codes (SIC)

Data Source SIC Code Description Primary
AIRS/AFS
3674
SEMICONDUCTORS AND RELATED DEVICES

AIRS/AFS
2842
SPECIALTY CLEANING, POLISHING, AND SANITATION PREPARATIONS

Facility Codes and Flags

EPA Region: 05
Duns Number:
Congressional District Number: 11
Legislative District Number:
HUC Code/Watershed: 07120007 / LOWER FOX
US Mexico Border Indicator:
Federal Facility: NO
Tribal Land: NO

Alternative Names

Alternative Name Source of Data
CABOT CORPORATION HAZARDOUS WASTE REPORT
COBOT MICROELECTRONICS CORP AIRS/AFS

Organizations

Affiliation Type Name DUNS Number Information System Mailing Address
OPERATOR
ENTEGRIS INC
RCRAINFO
View
OWNER
ENTEGRIS INC
RCRAINFO
View

National Industry Classification System Codes (NAICS)

Data Source NAICS Code Description Primary
RCRAINFO 334413 SEMICONDUCTOR AND RELATED DEVICE MANUFACTURING.
EIS 325612 POLISH AND OTHER SANITATION GOOD MANUFACTURING.
AIRS/AFS 325612 POLISH AND OTHER SANITATION GOOD MANUFACTURING.

Facility Mailing Addresses

Affiliation Type Delivery Point City Name State Postal Code Information System
OPERATOR 129 CONCORD ROAD BILLERICA MA 01821 RCRAINFO
REGULATORY CONTACT 870 COMMONS DRIVE AURORA IL 60504 RCRAINFO
OWNER 129 CONCORD ROAD BILLERICA MA 01821 RCRAINFO
FACILITY MAILING ADDRESS 870 COMMONS DR AURORA IL 60504 AIRS/AFS
FACILITY MAILING ADDRESS 500 COMMONS DRIVE AURORA IL 60504 RCRAINFO

Contacts

No Contacts returned.

Query executed on: OCT-15-2025