FRS Facility Detail Report


ZYGO TERAOPTIX INC

EPA Registry Id: 110012245221
20 WALKUP DRIVE
WESTBOROUGH, MA 01581-1019


The facility locations displayed
come from the FRS Spatial
Coordinates tables. They are the
best representative locations for
the displayed facilities based on
the accuracy of the collection
method and quality assurance
checks performed against each
location. The North American
Datum of 1983 is used to display
all coordinates.

Environmental Interests

Information System System Facility Name Information System Id/Report Link Environmental Interest Type Data Source Last Updated Date Supplemental Environmental Interests:
ICIS-AIR (AIR)
PALL CORPORATION MA0000002511800373 AIR SYNTHETIC MINOR ICIS 11/14/2018
RESOURCE CONSERVATION AND RECOVERY ACT INFORMATION SYSTEM
CYTIVA US LLC MAR000502385 SQG (Y) RCRAINFO

NATIONAL POLLUTANT DISCHARGE ELIMINATION SYSTEM (ICIS-NPDES)
CYTIVA US LLC MANOEJ02U STORM WATER INDUSTRIAL ICIS 06/07/2024
NATIONAL POLLUTANT DISCHARGE ELIMINATION SYSTEM (ICIS-NPDES)
CYTIVA US LLC MANOEJ02U ICIS-NPDES NON-MAJOR ICIS 06/07/2024
MASSACHUSETTS - ENVIRONMENTAL PROTECTION INTEGRATED COMPUTER SYSTEM
PALL CORPORATION 550716 STATE MASTER MA-EPICS
EPICS-606635
AIR STATIONARY POINT SOURCE
EPICS-558934
HAZARDOUS WASTE PROGRAM
AIR FACILITY SYSTEM
ZYGO TERAOPTIX 2511800373 AIR SYNTHETIC MINOR (PERMANENTLY CLOSED) AIRS/AFS 12/06/2011
MASSACHUSETTS - ENVIRONMENTAL PROTECTION INTEGRATED COMPUTER SYSTEM
ZYGO TERAOPTIX INC 345472 STATE MASTER MA-EPICS
EPICS-381858
HAZARDOUS WASTE PROGRAM
EPICS-348834
AIR STATIONARY POINT SOURCE

Additional EPA Reports:  

MyEnvironment  Enforcement and Compliance  Facility Coordinates Viewer  Watershed Report

Standard Industrial Classification Codes (SIC)

Data Source SIC Code Description Primary
AIR
3827
OPTICAL INSTRUMENTS AND LENSES

AIRS/AFS
3827
OPTICAL INSTRUMENTS AND LENSES

NPDES
3829
MEASURING AND CONTROLLING DEVICES, NOT ELSEWHERE CLASSIFIED

Facility Codes and Flags

EPA Region: 01
Duns Number:
Congressional District Number: 02
Legislative District Number: C
HUC Code/Watershed: 01070005 / CONCORD
US Mexico Border Indicator:
Federal Facility: NO
Tribal Land: NO

Alternative Names

Alternative Name Source of Data
PALL CORPORATION MA-EPICS
ZYGOTERAOPTIX AIRS/AFS

Organizations

Affiliation Type Name DUNS Number Information System Mailing Address
REGULATORY CONTACT
ZYGO TERAOPTIX
MA-EPICS
View
OPERATOR
PALL CORPORATION
RCRAINFO
View
OPERATOR
PALL CORPORATION
RCRAINFO
View
REGULATORY CONTACT
ZYGO TERAOPTIX
MA-EPICS
View
OWNER
ARE-MA REGION NO 26 LLC
RCRAINFO
View
OWNER
ZYGO TERAOPTIX
MA-EPICS
View
OWNER
ARE-MA REGION NO 26 LLC
RCRAINFO
View

National Industry Classification System Codes (NAICS)

Data Source NAICS Code Description Primary
AIRS/AFS 333314 OPTICAL INSTRUMENT AND LENS MANUFACTURING.
AIR 333314 OPTICAL INSTRUMENT AND LENS MANUFACTURING.
MA-EPICS 334513 INSTRUMENTS AND RELATED PRODUCTS MANUFACTURING FOR MEASURING, DISPLAYING, AND CONTROLLING INDUSTRIAL PROCESS VARIABLES.
RCRAINFO 339112 SURGICAL AND MEDICAL INSTRUMENT MANUFACTURING.
MA-EPICS 333314 OPTICAL INSTRUMENT AND LENS MANUFACTURING.
MA-EPICS 339112 SURGICAL AND MEDICAL INSTRUMENT MANUFACTURING.

Facility Mailing Addresses

Affiliation Type Delivery Point City Name State Postal Code Information System
REGULATORY CONTACT 20 WALKUP DRIVE WESTBOROUGH MA 015810000 MA-EPICS
FACILITY MAILING ADDRESS 20 WALKUP DRIVE WESTBOROUGH MA 015810000 AIRS/AFS
REGULATORY CONTACT 20 WALKUP DR WESTBOROUGH MA 01581-0000 MA-EPICS
FACILITY MAILING ADDRESS 20 WALKUP DRIVE WESTBOROUGH MA 015810000 RCRAINFO
OPERATOR 20 WALKUP DRIVE WESTBOROUGH MA 015810000 RCRAINFO
OWNER 20 WALKUP DR WESTBOROUGH MA 01581-0000 MA-EPICS
REGULATORY CONTACT 20 WALKUP DRIVE WESTBOROUGH MA 015810000 RCRAINFO
REGULATORY CONTACT 20 WALKUP DR WESTBOROUGH MA 01581-0000 RCRAINFO
FACILITY MAILING ADDRESS 20 WALKUP DR WESTBOROUGH MA 015810000 MA-EPICS
FACILITY MAILING ADDRESS 20 WALKUP DRIVE WESTBOROUGH MA 015810000 AIR
OPERATOR 20 WALKUP DR WESTBOROUGH MA 01581-0000 RCRAINFO
OWNER 20 WALKUP DRIVE WESTBOROUGH MA 015810000 RCRAINFO
FACILITY MAILING ADDRESS 20 WALKUP DR WESTBOROUGH MA 01581-0000 MA-EPICS
OWNER 20 WALKUP DR WESTBOROUGH MA 01581-0000 RCRAINFO

Contacts

Affiliation Type Full Name Office Phone Information System Mailing Address
COMPLIANCE CONTACT
DAVID UNGER
5083891760
AIR


UNKNOWN CONTACT
DAVID UNGER
5083891760
AIRS/AFS


COMPLIANCE CONTACT
DAVID UNGER
5083891760
AIRS/AFS


UNKNOWN CONTACT
DAVID UNGER
5083891760
AIR


REGULATORY CONTACT
MICHAEL FREMPONG
508-768-8688
RCRAINFO
View

Query executed on: OCT-14-2025