FRS Facility Detail Report


AXCELIS TECHNOLOGIES

EPA Registry Id: 110012161230
108 CHERRY HILL DR
BEVERLY, MA 01915


The facility locations displayed
come from the FRS Spatial
Coordinates tables. They are the
best representative locations for
the displayed facilities based on
the accuracy of the collection
method and quality assurance
checks performed against each
location. The North American
Datum of 1983 is used to display
all coordinates.

Environmental Interests

Information System System Facility Name Information System Id/Report Link Environmental Interest Type Data Source Last Updated Date Supplemental Environmental Interests:
RESOURCE CONSERVATION AND RECOVERY ACT INFORMATION SYSTEM
AXCELIS TECHNOLOGIES INC MAD106768344 SQG (Y) RCRAINFO

MASSACHUSETTS - ENVIRONMENTAL PROTECTION INTEGRATED COMPUTER SYSTEM
AXCELIS TECHNOLOGIES INC 131347 STATE MASTER MA-EPICS
EPICS-305404
AIR STATIONARY POINT SOURCE
EPICS-31926
HAZARDOUS WASTE PROGRAM
EPICS-362578
AIR STATIONARY POINT SOURCE
TOXIC SUBSTANCES CONTROL ACT
AXCELIS TECHNOLOGIES, INC TSCA10134221 TSCA SUBMITTER API 05/31/2022
AIR FACILITY SYSTEM
AXCELIS TECHNOLOGIES INC 2511901846 AIR MINOR (OPERATING) AIRS/AFS 08/11/2010
BIENNIAL REPORTERS
AXCELIS TECHNOLOGIES INC MAD106768344 HAZARDOUS WASTE BIENNIAL REPORTER RCRAINFO 12/31/2011
ICIS-AIR (AIR)
AXCELIS TECHNOLOGIES INC MA0000002511901846 AIR MINOR ICIS 10/19/2014
NATIONAL POLLUTANT DISCHARGE ELIMINATION SYSTEM (ICIS-NPDES)
AXCELIS TECHNOLOGIES, INC. MAR053136 ICIS-NPDES NON-MAJOR ICIS 06/19/2021 ICIS-
ENFORCEMENT/COMPLIANCE ACTIVITY
NATIONAL POLLUTANT DISCHARGE ELIMINATION SYSTEM (ICIS-NPDES)
AXCELIS TECHNOLOGIES, INC. MAR053136 STORM WATER INDUSTRIAL ICIS 06/19/2021 ICIS-
ENFORCEMENT/COMPLIANCE ACTIVITY
INTEGRATED COMPLIANCE INFORMATION SYSTEM AXCELIS TECHNOLOGIES INC 1000000633 ENFORCEMENT/COMPLIANCE ACTIVITY ICIS 05/13/2008
EMISSION INVENTORY SYSTEM (EIS)
AXCELIS TECHNOLOGIES INC 14504511 AIR MINOR EIS 01/06/2025
TOXICS RELEASE INVENTORY SYSTEM
EATON CORP 01915TNCRP108CH TRI REPORTER TRIS

INTEGRATED COMPLIANCE INFORMATION SYSTEM AXCELIS TECHNOLOGIES INC 1000000632 ENFORCEMENT/COMPLIANCE ACTIVITY ICIS 05/13/2008

Additional EPA Reports:  

MyEnvironment  Enforcement and Compliance  Facility Coordinates Viewer  Watershed Report

Standard Industrial Classification Codes (SIC)

Data Source SIC Code Description Primary
NPDES
3559
SPECIAL INDUSTRY MACHINERY, NOT ELSEWHERE CLASSIFIED

AIRS/AFS
9999
NONCLASSIFIABLE ESTABLISHMENTS

AIR
9999
NONCLASSIFIABLE ESTABLISHMENTS

TRIS
3559
SPECIAL INDUSTRY MACHINERY, NOT ELSEWHERE CLASSIFIED

Facility Codes and Flags

EPA Region: 01
Duns Number: 004155818
Congressional District Number: 06
Legislative District Number:
HUC Code/Watershed: 01090001 / CHARLES
US Mexico Border Indicator:
Federal Facility: NO
Tribal Land: NO

Alternative Names

Alternative Name Source of Data
EATON CORPORATION HAZARDOUS WASTE REPORT
EATON CORP TRI REPORTING FORM

Organizations

Affiliation Type Name DUNS Number Information System Mailing Address
REGULATORY CONTACT
AXCELIS TECHNOLOGIES INC
MA-EPICS
View
OPERATOR
AXCELIS TECHNOLOGIES INC
RCRAINFO
View
REGULATORY CONTACT
AXCELIS TECHNOLOGIES INC
MA-EPICS
View
OWNER
AXCELIS TECHNOLOGIES INC
RCRAINFO
View
PARENT COMPANY
EATON CORP 004155818
TRIS


OWNER
AXCELIS TECHNOLOGIES INC
MA-EPICS
View
OWNER
AXCELIS TECHNOLOGIES INC
MA-EPICS
View
PARENT COMPANY
AXCELIS TECHNOLOGIES INC
EIS


OWNER
AXCELIS TECHNOLOGIES INC
RCRAINFO
View
REGULATORY CONTACT
AXCELIS TECHNOLOGIES INC
MA-EPICS
View
REGULATORY CONTACT
AXCELIS TECHNOLOGIES INC
MA-EPICS
View
REGULATORY CONTACT
EATON CORP
MA-EPICS
View
OPERATOR
AXCELIS TECHNOLOGIES INC
RCRAINFO
View
REGULATORY CONTACT
EATON CORPORATION
MA-EPICS
View

National Industry Classification System Codes (NAICS)

Data Source NAICS Code Description Primary
TRIS 333295 SEMICONDUCTOR MACHINERY MANUFACTURING.
MA-EPICS 333298 ALL OTHER INDUSTRIAL MACHINERY MANUFACTURING.
MA-EPICS 339999 ALL OTHER MISCELLANEOUS MANUFACTURING.
AIRS/AFS 333295 SEMICONDUCTOR MACHINERY MANUFACTURING.
MA-EPICS 333242

MA-EPICS 333295 SEMICONDUCTOR MACHINERY MANUFACTURING.
AIR 333295 SEMICONDUCTOR MACHINERY MANUFACTURING.
EIS 333242

RCRAINFO 333242

Facility Mailing Addresses

Affiliation Type Delivery Point City Name State Postal Code Information System
REGULATORY CONTACT 108 CHERRY HILL DR BEVERLY MA 01915 MA-EPICS
OWNER 108 CHERRY HILL DR BEVERLY MA 01915 RCRAINFO
FACILITY MAILING ADDRESS 108 CHERRY HILL DR BEVERLY MA 01915 AIR
REGULATORY CONTACT 108 CHERRY HILL DR BEVERLY MA 01915-0000 RCRAINFO
OWNER 108 CHERRY HILL DR BEVERLY MA 01915-0000 RCRAINFO
OPERATOR 108 CHERRY HILL DR BEVERLY MA 01915 RCRAINFO
MAILING ADDRESS 108 CHERRY HILL DR BEVERLY MA 01915-0000 TRIS
FACILITY MAILING ADDRESS 108 CHERRY HILL DR BEVERLY MA 019150000 MA-EPICS
OWNER 108 CHERRY HILL DR BEVERLY MA 019150000 MA-EPICS
FACILITY MAILING ADDRESS 108 CHERRY HILL DR BEVERLY MA 01915 AIRS/AFS
REGULATORY CONTACT 108 CHERRY HILL ROAD BEVERLY MA 019150000 MA-EPICS
FACILITY MAILING ADDRESS 108 CHERRY HILL DR BEVERLY MA 01915 RCRAINFO
OPERATOR 108 CHERRY HILL DR BEVERLY MA 01915-0000 RCRAINFO

Contacts

Affiliation Type Full Name Office Phone Information System Mailing Address
UNKNOWN CONTACT
R G AICHELMANN 97878
9787879674
AIRS/AFS


COMPLIANCE CONTACT
R G AICHELMANN 97878
9787879674
AIR


REGULATORY CONTACT
HILLARY MATTHEWS
978-787-9637
RCRAINFO
View
COMPLIANCE CONTACT
R G AICHELMANN 97878
9787879674
AIRS/AFS


PUBLIC CONTACT
PATRICK COLLINS
5089219885
TRIS


UNKNOWN CONTACT
R G AICHELMANN 97878
9787879674
AIR


Query executed on: OCT-14-2025


Additional information for CERCLIS or TRI sites:

This information resource is not maintained, managed, or owned by the Environmental Protection Agency (EPA) or the Envirofacts Support Team. Neither the EPA nor the Envirofacts Support Team is responsible for their content or site operation. The Envirofacts Warehouse provides this reference only as a convenience to our Internet users.

  • National Library of Medicine (NLM) TOXMAP