FRS Facility Detail Report


ENTEGRIS INC

EPA Registry Id: 110002350722
845 ENTERPRISE DR
AURORA, IL 60504-7933


The facility locations displayed
come from the FRS Spatial
Coordinates tables. They are the
best representative locations for
the displayed facilities based on
the accuracy of the collection
method and quality assurance
checks performed against each
location. The North American
Datum of 1983 is used to display
all coordinates.

Environmental Interests

Information System System Facility Name Information System Id/Report Link Environmental Interest Type Data Source Last Updated Date Supplemental Environmental Interests:
RESOURCE CONSERVATION AND RECOVERY ACT INFORMATION SYSTEM
ENTEGRIS INC. ILR000075663 LQG (Y) RCRAINFO
ICIS-
ENFORCEMENT/COMPLIANCE ACTIVITY
BIENNIAL REPORTERS
ENTEGRIS INC. ILR000075663 HAZARDOUS WASTE BIENNIAL REPORTER RCRAINFO 12/31/2021
ICIS-AIR (AIR)
ENTEGRIS INC IL000043407AAG AIR MINOR ICIS 11/12/2014
OCCUPATIONAL SAFETY AND HEALTH ADMINISTRATION INFORMATION SYSTEM
CABOT MICROELECTRONICS POLISHING CORPORATION 339416976 OSHA ESTABLISHMENT OSHA-OIS 09/12/2018
TOXIC SUBSTANCES CONTROL ACT
CABOT MICROELECTRONIC CORP TSCA88150 TSCA SUBMITTER TSCA 10/30/2017
EMISSION INVENTORY SYSTEM (EIS)
ENTEGRIS INC 3221011 AIR EMISSIONS CLASSIFICATION UNKNOWN EIS 01/30/2025
AIR FACILITY SYSTEM
CABOT MICROELECTRONIC CORP 1704300525 AIR MINOR (OPERATING) AIRS/AFS 05/16/2014
AGENCY COMPLIANCE AND ENFORCEMENT SYSTEMS
CABOT MICROELECTRONICS CORP 170001496879 STATE MASTER ACES
-ILR005946
NPDES PERMIT
AGENCY COMPLIANCE AND ENFORCEMENT SYSTEMS
CABOT MICROELECTRONIC CORP 170000075709 STATE MASTER ACES
-043407AAG
AIR PROGRAM
-ILR005946
NPDES PERMIT
-0434075071
SOLID WASTE PROGRAM
-0434075071
HAZARDOUS WASTE PROGRAM

Additional EPA Reports:  

MyEnvironment  Enforcement and Compliance  Facility Coordinates Viewer  Watershed Report

Standard Industrial Classification Codes (SIC)

Data Source SIC Code Description Primary
AIRS/AFS
3674
SEMICONDUCTORS AND RELATED DEVICES

AIR
3674
SEMICONDUCTORS AND RELATED DEVICES

Facility Codes and Flags

EPA Region: 05
Duns Number:
Congressional District Number: 11
Legislative District Number:
HUC Code/Watershed: 07120007 / LOWER FOX
US Mexico Border Indicator:
Federal Facility: NO
Tribal Land: NO

Alternative Names

Alternative Name Source of Data
CABOT MICROELECTRONICS CORP. AIRS/AFS
CABOT MICROELECTRONIC CORP FRS

Organizations

Affiliation Type Name DUNS Number Information System Mailing Address
OWNER
ENTEGRIS INC
RCRAINFO
View
OPERATOR
ENTEGRIS INC
RCRAINFO
View

National Industry Classification System Codes (NAICS)

Data Source NAICS Code Description Primary
EIS 334413 SEMICONDUCTOR AND RELATED DEVICE MANUFACTURING.
AIR 334413 SEMICONDUCTOR AND RELATED DEVICE MANUFACTURING.
RCRAINFO 334413 SEMICONDUCTOR AND RELATED DEVICE MANUFACTURING.
AIRS/AFS 334413 SEMICONDUCTOR AND RELATED DEVICE MANUFACTURING.
OSHA-OIS 334413 SEMICONDUCTOR AND RELATED DEVICE MANUFACTURING.

Facility Mailing Addresses

Affiliation Type Delivery Point City Name State Postal Code Information System
OPERATOR 129 CONCORD ROAD BILLERICA MA 01821 RCRAINFO
OWNER 129 CONCORD ROAD BILLERICA MA 01821 RCRAINFO
FACILITY MAILING ADDRESS 870 N COMMONS AURORA IL 60504 RCRAINFO
FACILITY MAILING ADDRESS 870 COMMONS DR AURORA IL 60504 AIRS/AFS
REGULATORY CONTACT 845 ENTERPRISE DRIVE AURORA IL 60504 RCRAINFO

Contacts

No Contacts returned.

Query executed on: OCT-14-2025